JPH077168Y2 - インクジェットヘッド - Google Patents
インクジェットヘッドInfo
- Publication number
- JPH077168Y2 JPH077168Y2 JP1987172483U JP17248387U JPH077168Y2 JP H077168 Y2 JPH077168 Y2 JP H077168Y2 JP 1987172483 U JP1987172483 U JP 1987172483U JP 17248387 U JP17248387 U JP 17248387U JP H077168 Y2 JPH077168 Y2 JP H077168Y2
- Authority
- JP
- Japan
- Prior art keywords
- layer
- substrate
- conductor layer
- heating resistor
- common electrode
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000000758 substrate Substances 0.000 claims description 26
- 239000004020 conductor Substances 0.000 claims description 23
- 238000010438 heat treatment Methods 0.000 claims description 12
- 239000007788 liquid Substances 0.000 claims description 6
- 230000020169 heat generation Effects 0.000 claims description 4
- 239000010410 layer Substances 0.000 description 63
- 238000000034 method Methods 0.000 description 8
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 4
- 229910052782 aluminium Inorganic materials 0.000 description 4
- BPUBBGLMJRNUCC-UHFFFAOYSA-N oxygen(2-);tantalum(5+) Chemical compound [O-2].[O-2].[O-2].[O-2].[O-2].[Ta+5].[Ta+5] BPUBBGLMJRNUCC-UHFFFAOYSA-N 0.000 description 4
- 229910052581 Si3N4 Inorganic materials 0.000 description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 3
- 238000005192 partition Methods 0.000 description 3
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 3
- 229910052814 silicon oxide Inorganic materials 0.000 description 3
- 238000001816 cooling Methods 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 238000005338 heat storage Methods 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- MZLGASXMSKOWSE-UHFFFAOYSA-N tantalum nitride Chemical compound [Ta]#N MZLGASXMSKOWSE-UHFFFAOYSA-N 0.000 description 2
- 229910001936 tantalum oxide Inorganic materials 0.000 description 2
- PBCFLUZVCVVTBY-UHFFFAOYSA-N tantalum pentoxide Inorganic materials O=[Ta](=O)O[Ta](=O)=O PBCFLUZVCVVTBY-UHFFFAOYSA-N 0.000 description 2
- 208000003028 Stuttering Diseases 0.000 description 1
- PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
- 230000008602 contraction Effects 0.000 description 1
- 230000008034 disappearance Effects 0.000 description 1
- 238000007599 discharging Methods 0.000 description 1
- 238000005553 drilling Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 238000009413 insulation Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000011241 protective layer Substances 0.000 description 1
- 229910052710 silicon Inorganic materials 0.000 description 1
- 239000010703 silicon Substances 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Particle Formation And Scattering Control In Inkjet Printers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172483U JPH077168Y2 (ja) | 1987-11-11 | 1987-11-11 | インクジェットヘッド |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987172483U JPH077168Y2 (ja) | 1987-11-11 | 1987-11-11 | インクジェットヘッド |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH0176239U JPH0176239U (en]) | 1989-05-23 |
| JPH077168Y2 true JPH077168Y2 (ja) | 1995-02-22 |
Family
ID=31464454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987172483U Expired - Lifetime JPH077168Y2 (ja) | 1987-11-11 | 1987-11-11 | インクジェットヘッド |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH077168Y2 (en]) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7905577B2 (en) * | 2006-12-15 | 2011-03-15 | Canon Kabushiki Kaisha | Printhead substrate having electrothermal transducers arranged at high density, printhead, and printing apparatus |
| JP5534683B2 (ja) * | 2009-02-06 | 2014-07-02 | キヤノン株式会社 | インクジェット記録ヘッド |
Family Cites Families (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2562439B2 (ja) * | 1986-11-07 | 1996-12-11 | キヤノン株式会社 | 液体噴射記録ヘッドおよび液体噴射方法 |
-
1987
- 1987-11-11 JP JP1987172483U patent/JPH077168Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0176239U (en]) | 1989-05-23 |
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